In this paper, the MEMS type ionization gauge with no X-Ray limitations has been presented. Having the dimensions of 2.4 mm× 0.8mm × 1.4 mm, the designed gauge is 9000 times smaller than the conventional type and can operate in HV and UHV pressures up to 5×10-9 torr. Operating at the temperature of 750°C, the cathode of proposed gauge is implemented using nickel and works in a way in...

This paper reviews mass spectrometers based on micro-electro-mechanical systems (MEMS) technology. The MEMS approach to integration is first briefly described, and the difficulties of miniaturizing mass spectrometers are outlined. MEMS components for ionization and mass filtering are then reviewed, together with additional components for ion detection, vacuum pressure measurement and pumping. M...

Every modern high vacuum and ultrahigh vacuum system relies on some form of ionization gauge for pressure measurements under 10 Torr. There are currently two competing ionization gauge technologies to choose from the hot cathode gauge (HCG) and the cold cathode gauge (CCG). This application note is designed to help vacuum users choose between the two competing ionization technologies. Each gaug...

Cubic silicon carbide is a promising material for Micro Electro Mechanical Systems (MEMS) applications in harsh environ-ments and bioapplications thanks to its large band gap, chemical inertness, excellent corrosion tolerance and capability of growth on a Si substrate. This paper reports the piezoresistive effect of p-type single crystalline 3C-SiC characterized at high temperatures, using an i...

2014 Human contact between ground and the metal parts of a vacuum chamber can be dangerous if the metal is not grounded, and if an ionization gauge is operating in the chamber at pressures of 0.1 pascal (7 x 10-4 torr) or higher. Lethal electrical shock can possibly occur if all of these conditions are present. Common grounding of the metal parts of the vacuum chamber and of the ionization gaug...